An enabling tool for maskless lithography
Be more efficient, save time and money with DaLI
An enabling tool for maskless lithography
Be more efficient, save time and money with DaLI
An enabling tool
for maskless lithography
Be more efficient, save time and money with DaLI
DaLI — a tabletop maskless lithography system
DaLI is a universal table-top system for maskless lithography with all standard photoresists. Its comprehensive software solution covers all steps from design to illumination and makes DaLI an intuitive solution for the maskless lithography process, regardless of users’ prior knowledge. Using a precisely guided laser source for the illumination of lithographic structures, DaLI skips the need for a mask. Maskless photolithography features make design changes a breeze, since it eliminates the highly sensitive step of sample-to-mask alignment, and saves both time and money in the process. DaLI makes for an infallible partner, also in state-of-the-art scientific endeavors, as it enables direct write lithography on micrometer sized samples, with structures precisely aligned on existing features.
DaLI — a tabletop maskless lithography system
DaLI is a universal table-top system for maskless lithography with all standard photoresists. Its comprehensive software solution covers all steps from design to illumination and makes DaLI an intuitive solution regardless of users’ prior knowledge. Using a precisely guided laser source for the illumination of lithographic structures, DaLI skips the need for a mask. Maskless photolithography features make design changes a breeze, since it eliminates the highly sensitive step of sample-to-mask alignment, and saves both time and money in the process. DaLI makes for an infallible partner, also in state-of-the-art scientific endeavors, as it enables direct write lithography on micrometer sized samples, with structures precisely aligned on existing features.
Software operated
The software solution covers all aspects of machine operation, from setup and calibration procedures to CAD and optimized illumination algorithms.
Ultimate precision
Acousto-optic deflectors (AOD) in combination with a stabilized laser source, complete thermal stabilization and an intelligent table tracking solution combine in ultimate precision.
User-friendly
Direct conversion of CAD drawings to processing regimes, one button operation and automated sample placement and focusing.
Broad applications
Fields of microelectronics, material science, quantum optics, MEMS, biophysics, lab-on-a-chip designs, microfluidics, soft-matter research, chemistry and biology experiments, and many others.
Software operated
The software solution covers all aspects of machine operation, from setup and calibration procedures to CAD and optimized illumination algorithms.
Ultimate precision
Acousto-optic deflectors (AOD) in combination with a stabilized laser source, complete thermal stabilization and an intelligent table tracking solution combine in ultimate precision.
User-friendly
Direct conversion of CAD drawings to processing regimes, one button operation and automated sample placement and focusing.
Broad applications
Fields of microelectronics, material science, quantum optics, MEMS, biophysics, lab-on-a-chip designs, microfluidics, soft-matter research, chemistry and biology experiments, and many others.
Become more efficient with DaLI
Let your idea become a design, your design be illuminated as a structure, and your structure integrated in the experiment — all within a single day using a tabletop lithography system.
Become more efficient with DaLI
Let your idea become a design, your design be illuminated as a structure, and your structure integrated in the experiment — all within a single day using a tabletop lithography system.
How DaLI works
Maskless photolithography is implemented by a near-UV laser source paired with acousto-optic deflectors (AOD) for quick and precise laser beam guiding, rapidly illuminating structures with nanometer precision on the material. The high light intensity achieved by using a laser source enables fast movement between regions of the sample according to structure design and optimized by software algorithms.
See how organizations like yours are using DaLI
Various electrodes and other designs can be transferred to a single micro crystal, mono layers and other demanding surfaces with DaLI.
Various electrodes and other designs can be transferred to a single micro crystal, mono layers and other demanding surfaces with DaLI.
Dense PCBs and simple chip designs can both be realized through a combination of lithographic steps and further chemical or other processing steps.
Standard photoresist materials for mask-based lithography are supported, offering an option to integrate DaLI into existing prototyping and manufacturing facilities.
Micro-electromechanical systems (or MEMS) can be designed and prepared through our CAD software combined with DaLI’s lithography capabilities.
Maskless lithography serves for either creating a mask for further etching steps (i.e. for silicon-based MEMS) or for direct structuring of thick photoresists, creating mechanical components made of photoresist materials.
Photoresist materials can either directly serve as a base layer for biophysical experiments, with surfaces modified through lithographic steps, or can be used to emboss the textured surface to other biocompatible materials.
Photoresist surface texturing is achieved with precise control of illumination parameters, resulting in various textures exhibiting different physical properties to control flows, biocompatibility, or friction.
Microfluidic channels embossed in PDMS or similar materials can exhibit high-aspect ratios, smooth walls, and well-defined corners, as well as potentially structured walls to manipulate flows of liquids or particles.
DaLI’s coarse tool offers higher processing speeds compared to fine tool as a consequence of using a larger laser spot size on material but achieves equally smooth channel wall as well as minimal deviations from vertical sides in case of thick photoresists.
Blog
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Lithographic procedures for fabrication of highly precise micron-scale conductive tracks on a variety of substrates has already become an industrial standard. We demonstrate a tabletop solution for prototyping and small series pro...
How can we help you?
"The company's sales and installation personnel are enthusiastic and professional. After the installation and acceptance, the manufacturer’s technical engineers helped improve the process and improved the process stability, which provided great help for our research work."
Prof. Chang-Jin Zhang
Center for Strong Magnetic Field Science, Hefei Institute of Material Science
"We deal with microfluidics or, more specifically, dielectric wetting (EWOD). Dali is used to make masks for process of electrodes sputtering on substrates. It's great because Dali allows us to make any electrode geometry and do it relatively quickly. The distance between the individual electrodes is very important and must be as small as possible. In addition, the device itself and its interface are relatively easy to use and you quickly get used to them. And of course, customer support is great."
Urban Tomc
Department of Thermal and Environmental Engineering, Laboratory of Refrigeration and District Energy
"Laboratory of Organic Matter Physics is engaged in research on charge transport, photoconductivity, and initial growth of organic semiconductors on graphene and other 2D nanostructures. Dali is a device that allows us to accurately fabricate metal electrodes on nanostructures, which is crucial for the course of our research. We use the device daily, several days a week. We appreciate its accuracy, compactness, speed, friendly interface, and extensive range of structure design tools."
Assoc. prof. dr. Egon Pavlica
University of Nova Gorica, Laboratory of Organic Matter Physics
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
How can we help you?
"The company's sales and installation personnel are enthusiastic and professional. After the installation and acceptance, the manufacturer’s technical engineers helped improve the process and improved the process stability, which provided great help for our research work."
Prof. Chang-Jin Zhang
Center for Strong Magnetic Field Science, Hefei Institute of Material Science
"We deal with microfluidics or, more specifically, dielectric wetting (EWOD). Dali is used to make masks for process of electrodes sputtering on substrates. It's great because Dali allows us to make any electrode geometry and do it relatively quickly. The distance between the individual electrodes is very important and must be as small as possible. In addition, the device itself and its interface are relatively easy to use and you quickly get used to them. And of course, customer support is great."
Urban Tomc
Department of Thermal and Environmental Engineering, Laboratory of Refrigeration and District Energy
"Laboratory of Organic Matter Physics is engaged in research on charge transport, photoconductivity, and initial growth of organic semiconductors on graphene and other 2D nanostructures. Dali is a device that allows us to accurately fabricate metal electrodes on nanostructures, which is crucial for the course of our research. We use the device daily, several days a week. We appreciate its accuracy, compactness, speed, friendly interface, and extensive range of structure design tools."
Assoc. prof. dr. Egon Pavlica
University of Nova Gorica, Laboratory of Organic Matter Physics
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
How can we help you?
"The company's sales and installation personnel are enthusiastic and professional. After the installation and acceptance, the manufacturer’s technical engineers helped improve the process and improved the process stability, which provided great help for our research work."
Prof. Chang-Jin Zhang
Center for Strong Magnetic Field Science, Hefei Institute of Material Science
"We deal with microfluidics or, more specifically, dielectric wetting (EWOD). Dali is used to make masks for process of electrodes sputtering on substrates. It's great because Dali allows us to make any electrode geometry and do it relatively quickly. The distance between the individual electrodes is very important and must be as small as possible. In addition, the device itself and its interface are relatively easy to use and you quickly get used to them. And of course, customer support is great."
Urban Tomc
Department of Thermal and Environmental Engineering, Laboratory of Refrigeration and District Energy
"Laboratory of Organic Matter Physics is engaged in research on charge transport, photoconductivity, and initial growth of organic semiconductors on graphene and other 2D nanostructures. Dali is a device that allows us to accurately fabricate metal electrodes on nanostructures, which is crucial for the course of our research. We use the device daily, several days a week. We appreciate its accuracy, compactness, speed, friendly interface, and extensive range of structure design tools."
Assoc. prof. dr. Egon Pavlica
University of Nova Gorica, Laboratory of Organic Matter Physics
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.