An enabling tool for maskless lithography

Be more efficient, save time and money with DaLI

An enabling tool for maskless lithography

Be more efficient, save time and money with DaLI

An enabling tool

for maskless lithography

Be more efficient, save time and money with DaLI

DaLI — a tabletop maskless lithography system

DaLI is a universal table-top system for maskless lithography with all standard photoresists. Its comprehensive software solution covers all steps from design to illumination and makes DaLI an intuitive solution for the maskless lithography process, regardless of users’ prior knowledge. Using a precisely guided laser source for the illumination of lithographic structures, DaLI skips the need for a mask. Maskless photolithography features make design changes a breeze, since it eliminates the highly sensitive step of sample-to-mask alignment, and saves both time and money in the process. DaLI makes for an infallible partner, also in state-of-the-art scientific endeavors, as it enables direct write lithography on micrometer sized samples, with structures precisely aligned on existing features.

miDALIX
miDALIX

DaLI — a tabletop maskless lithography system

DaLI is a universal table-top system for maskless lithography with all standard photoresists. Its comprehensive software solution covers all steps from design to illumination and makes DaLI an intuitive solution regardless of users’ prior knowledge. Using a precisely guided laser source for the illumination of lithographic structures, DaLI skips the need for a mask. Maskless photolithography features make design changes a breeze, since it eliminates the highly sensitive step of sample-to-mask alignment, and saves both time and money in the process. DaLI makes for an infallible partner, also in state-of-the-art scientific endeavors, as it enables direct write lithography on micrometer sized samples, with structures precisely aligned on existing features.

Software_operated

Software operated

The software solution covers all aspects of machine operation, from setup and calibration procedures to CAD and optimized illumination algorithms.

Ultimate_precision

Ultimate precision

Acousto-optic deflectors (AOD) in combination with a stabilized laser source, complete thermal stabilization and an intelligent table tracking solution combine in ultimate precision.

User_friendly

User-friendly

Direct conversion of CAD drawings to processing regimes, one button operation and automated sample placement and focusing.

Broad_applications

Broad applications

Fields of microelectronics, material science, quantum optics, MEMS, biophysics, lab-on-a-chip designs, microfluidics, soft-matter research, chemistry and biology experiments, and many others.

Software_operated

Software operated

The software solution covers all aspects of machine operation, from setup and calibration procedures to CAD and optimized illumination algorithms.

Ultimate_precision

Ultimate precision

Acousto-optic deflectors (AOD) in combination with a stabilized laser source, complete thermal stabilization and an intelligent table tracking solution combine in ultimate precision.

User_friendly

User-friendly

Direct conversion of CAD drawings to processing regimes, one button operation and automated sample placement and focusing.

Broad_applications

Broad applications

Fields of microelectronics, material science, quantum optics, MEMS, biophysics, lab-on-a-chip designs, microfluidics, soft-matter research, chemistry and biology experiments, and many others.

Become more efficient with DaLI

Let your idea become a design, your design be illuminated as a structure, and your structure integrated in the experiment — all within a single day using a tabletop lithography system.

Become more efficient with DaLI

Let your idea become a design, your design be illuminated as a structure, and your structure integrated in the experiment — all within a single day using a tabletop lithography system.

How-DaLI-works

How DaLI works

Maskless photolithography is implemented by a near-UV laser source paired with acousto-optic deflectors (AOD) for quick and precise laser beam guiding, rapidly illuminating structures with nanometer precision on the material. The high light intensity achieved by using a laser source enables fast movement between regions of the sample according to structure design and optimized by software algorithms.

See how organizations like yours are using DaLI

Various electrodes and other designs can be transferred to a single micro crystal, mono layers and other demanding surfaces with DaLI.

Various electrodes and other designs can be transferred to a single micro crystal, mono layers and other demanding surfaces with DaLI.

Material-Science

Dense PCBs and simple chip designs can both be realized through a combination of lithographic steps and further chemical or other processing steps.

Standard photoresist materials for mask-based lithography are supported, offering an option to integrate DaLI into existing prototyping and manufacturing facilities.

Microelectronics

Micro-electromechanical systems (or MEMS) can be designed and prepared through our CAD software combined with DaLI’s lithography capabilities.

Maskless lithography serves for either creating a mask for further etching steps (i.e. for silicon-based MEMS) or for direct structuring of thick photoresists, creating mechanical components made of photoresist materials.

MEMS

Photoresist materials can either directly serve as a base layer for biophysical experiments, with surfaces modified through lithographic steps, or can be used to emboss the textured surface to other biocompatible materials.

Photoresist surface texturing is achieved with precise control of illumination parameters, resulting in various textures exhibiting different physical properties to control flows, biocompatibility, or friction.

Biophysics

Microfluidic channels embossed in PDMS or similar materials can exhibit high-aspect ratios, smooth walls, and well-defined corners, as well as potentially structured walls to manipulate flows of liquids or particles.

DaLI’s coarse tool offers higher processing speeds compared to fine tool as a consequence of using a larger laser spot size on material but achieves equally smooth channel wall as well as minimal deviations from vertical sides in case of thick photoresists.

Microfluidics

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